Micromachined Transducers Sourcebook 1st Edition

Written in 1998 the book is getting a little long in the tooth and needs some updating. However the principles of many types of MEMS tranducers are covered as well as the basic process technology. It is probably the still best introduction to MEMS you can buy. The organisational structure of the book make it a good starting reference as each topic is dealt with in a fairly self contained way.Expensive but worth the money.

purchased for a class in college. MEMs are pretty awesome and this book is a good intro...but not what id call in depth.

Horrible book fonts. Like bad penmanship. Good topic coverage though.

This book is a good reference for graduate level reading and MEMS researchers. The author writes clearly and does a good job of highlighting important work in the field. However, the main problem with the book is the organization and the multiple forward references. Many terms are not explained the first time around (and appear two sections or a chapter later). The references are not numbered and are somewhat difficult to look up by name. The same problem with figures. The book classifies sensors and actuators according to their primary function (mechanical, thermal, optical...). Accurate references with page or section numbers to other chapters would help particularly with such a classification. Madou's "Fundamentals of Microfabrication" book and Sze's "Semiconductor Sensors" book complement this book nicely.